Prefurnace Clean Sink (PFC Sink) - Login | Nanolab, UCLA

4.0 GENERAL
Note: Follow all safety procedures for handling, pouring, and disposing of
chemicals.
Note: This procedure is to be conducted only within the exhausting PFC Sink fume
hood.
Materials: Use only the clean quartz constant temperature bath identified as Bath 1 or
Bath 2. Use dedicated materials for any piece that comes in direct contact with the acid
solutions. Keep the wafer carrier handles with the wafer carrier in the chemical baths.
5.0 PROCESS PREPARATION
5.1 Select bath and wafer cassettes
1. There are two chemical baths located on the center-right side of the PFC sink (see figure
1).
CAUTION: Do not use any of the colored cassettes e.g., black or
orange. (These are not Teflon)
2. For 4 inch, use a full 4 inch cassette and they are located in the storage cart under the
fumehood. (See Figure 3)
Figure 3
3. Single wafer Teflon carriers are available for single 2.5" or quartered wafers, or for
irregularly shaped substrates.