slides (pdf)
slides (pdf)
slides (pdf)
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
• Yes!<br />
Interfaces with Different Abruptness:<br />
• Ge-implanted sample<br />
from ORNL (1989).<br />
• Sample history:<br />
Si/SiO 2 vs. Si:Ge/SiO 2<br />
• Ge implanted into Si<br />
(10 16 cm -2 , 100 keV)<br />
• ~ 800 o C oxidation<br />
Computational Materials Science and Engineering<br />
Initial Ge distribution<br />
~120 nm<br />
~4%