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• Yes!<br />

Interfaces with Different Abruptness:<br />

• Ge-implanted sample<br />

from ORNL (1989).<br />

• Sample history:<br />

Si/SiO 2 vs. Si:Ge/SiO 2<br />

• Ge implanted into Si<br />

(10 16 cm -2 , 100 keV)<br />

• ~ 800 o C oxidation<br />

Computational Materials Science and Engineering<br />

Initial Ge distribution<br />

~120 nm<br />

~4%

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