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Reason for TED: Implant Damage<br />
NEBM-DFT: Interstitial assisted two-step mechanism:<br />
Intrinsic diffusion:<br />
Create interstitial, B captures interstitial, diffuse together<br />
⇒ Diffusion barrier: E form (I) – E bind (BI) + E mig (BI)<br />
4 eV 1 eV 0.6 eV ~ 3.6 eV<br />
After implant:<br />
Interstitials for “free” ⇒ transient enhanced diffusion<br />
W. Windl, M.M. Bunea, R. Stumpf, S.T. Dunham, and M.P. Masquelier,<br />
Proc. MSM99 (Cambridge, MA, 1999), p. 369; MRS Proc. 568, 91 (1999); Phys. Rev. Lett. 83, 4345 (1999).<br />
Computational Materials Science and Engineering