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Conc. (cm -3 )<br />
Calibration with SIMS Measurements<br />
• Sum of small errors in ab-initio exponents has big effect on<br />
continuum model<br />
∀⇒ refining of ab-initio numbers necessary<br />
• Use Genetic Algorithm for recalibration<br />
10 19<br />
10 18<br />
10 17<br />
10 16<br />
650 o C<br />
20 min<br />
As impl.<br />
SIMS<br />
Model<br />
1025 o C<br />
20 s<br />
0 0.5 0 0.5 0 0.5<br />
Depth (μm)<br />
800 o C<br />
20 min<br />
Computational Materials Science and Engineering<br />
30 min
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