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0.5 nm<br />
Si<br />
Intensity<br />
Si/SiO vs. Ge/SiO 2 2<br />
Atomic Resolution EELS<br />
Si - L 2,3<br />
100 105 110<br />
Energy-loss (eV)<br />
0.5 nm<br />
S. Lopatin et al., Microscopy and Microanalysis, San Antonio, 2003.<br />
Si - L 2,3<br />
Ge<br />
Ge<br />
Intensity<br />
SiGe<br />
Computational Materials Science and Engineering<br />
100 105 110<br />
Energy-loss (eV)<br />
oxide
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