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Physical Multiscale Process Modeling REED-MD<br />
Ab Initio: Diffusion<br />
parameters, stress<br />
dependence, etc.<br />
2<br />
Relate atomistic<br />
calculations to<br />
macroscopic eqs.<br />
Device modeling<br />
compare modeled<br />
results to specs.<br />
Met ⇒ done,<br />
otherwise goto 1.<br />
Computational Materials Science and Engineering<br />
3<br />
5<br />
Diffusion Solver<br />
- read in implant<br />
- solve diffusion<br />
Implant:<br />
“ab-initio”<br />
modeling<br />
(3D dopant<br />
distribution<br />
)<br />
1<br />
4
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