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University of Leoben Dissertation I
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To my family
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Acknowledgements I would like to th
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Abstract A method for the determina
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Non quia difficilia sunt non audemu
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Contents Affidavit V Acknowledgemen
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Contents E Mechanics of Residually
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1.1 Why Coatings? 1 Introduction Su
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1.2 Fabrication Processes of Thin F
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components are discussed subsequent
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1.3.3 Friction and Wear 1.3 Origin
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1.4 Methods for Film Stress Measure
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1.4 Methods for Film Stress Measure
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1.4 Methods for Film Stress Measure
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1.5 Fracture Mechanics of Thin Film
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Cantilever Beam Deflection Method 1
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1.5 Fracture Mechanics of Thin Film
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Bibliography [1] Freund LB, Suresh
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Aim of the Dissertation The aim of
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Summary The main task of this disse
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involved, the incident angle, the i
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a new method that allows the straig
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2 List of appended papers Paper A S
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A A Direct Method of Determining Co
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A.3 Experimental 840nm PVD-deposite
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A.4 Calculation Procedure and Resul
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A.4 Calculation Procedure and Resul
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A.4 Calculation Procedure and Resul
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A.4 Calculation Procedure and Resul
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A.5 Remarks on the Determined Stres
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- Page 65 and 66: A.6 Discussion of Possible Sources
- Page 67 and 68: Bibliography to paper A [1] Eiper E
- Page 69 and 70: B Stress Measurement in Thin Films
- Page 71 and 72: B.2 Brief Description of the ILR Me
- Page 73 and 74: B.3 Discussion of Sources of Error
- Page 75 and 76: B.3.3 Accuracy of SEM Measurements
- Page 77 and 78: B.4 Experimental Design to Minimize
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- Page 83 and 84: B.5 Determination of Young’s Modu
- Page 85 and 86: [1] Massl S, Keckes J, Pippan R, Ac
- Page 87 and 88: C A New Cantilever Technique Reveal
- Page 89 and 90: C.2 Experimental curved, which assu
- Page 91 and 92: C.2 Experimental of residual stress
- Page 93 and 94: C.3 Discussion and Concluding Remar
- Page 95 and 96: [1] Nix WD. Metall Trans A 1989;20A
- Page 97 and 98: D Investigation of Fracture Propert
- Page 99 and 100: D.2 Experimental the bias voltage w
- Page 101 and 102: D.2 Experimental Table D.1: The com
- Page 103 and 104: D.3 Results Figure D.5: SEM picture
- Page 105 and 106: D.4 Discussion Table D.3: Deflectio
- Page 107 and 108: D.4 Discussion strength with. Kamiy
- Page 109 and 110: D.5 Conclusion stresses, which disa
- Page 111 and 112: Bibliography to paper D [1] Weppelm
- Page 113: Bibliography to paper D [44] Ziegle
- Page 117 and 118: E.2 Sign Convention Figure E.1: Ini
- Page 119 and 120: E.4 Calculation of the Normal Stres
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- Page 123 and 124: E.6 Moment Balance Figure E.5: Forc
- Page 125 and 126: E.8 Correlation of the Stresses in
- Page 127 and 128: E.9 An Example: Depth Profile of Re