1 - Erich Schmid Institute

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$dissertation global and local fracture properties of metal matrix ...$

B Bibliography to paper B [21] Antunes JM, Fernandes JV, Sakharova NA, Oliveira MC, Menezes LF. Int J Solids Struct 2007;44:8313. [22] Tran MD, Poublan J, Dautzenberg JH. Thin Solid Films 1997;308-309:310. [23] Kim YR, Chen P, Aziz MJ, Branton D, Vlassak JJ. J Appl Phys 2006;100:104322. [24] Kiener D, Motz C, Rester M, Jenko M, Dehm G. Mater Sci Eng A 2007;459:262. [25] Ziegler JF, Biersack JP, Littmark U. The Stopping Range of Ions in Matter. New York: Pergamon Press;1985, p. 321. [26] Devington PR. Data Reduction and Error Analysis for the Physical Sciences. New York: Mc Graw-Hill Book Company;1991. [27] Nix WD. Metall Trans A 1989;20A:2217. B–18
C A New Cantilever Technique Reveals Spatial Distributions of Residual Stresses in Near-Surface Structures S. Massl a , J. Keckes b and R. Pippan a a Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A–8700 Leoben, Austria b Department Materials Physics, University of Leoben, A–8700 Leoben, Austria Abstract A focused ion beam technique that allows the characterization of spatial residual stresses in near-surface structures with a depth resolution on a nanoscale and a lateral resolution in the micron-range is introduced. It is based on the fabrication of a microcantilever and the gradual removal of the residually stressed material which leads to a change in the measured deflection. The method is presented by determining a spatial stress distribution around a scratch in a 840nm thin Ni film on Si. C–1 C
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University of Leoben Dissertation I
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To my family
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Acknowledgements I would like to th
Page 9 and 10:
Abstract A method for the determina
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Non quia difficilia sunt non audemu
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Contents Affidavit V Acknowledgemen
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Contents E Mechanics of Residually
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1.1 Why Coatings? 1 Introduction Su
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1.2 Fabrication Processes of Thin F
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components are discussed subsequent
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1.3.3 Friction and Wear 1.3 Origin
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1.4 Methods for Film Stress Measure
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1.5 Fracture Mechanics of Thin Film
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Cantilever Beam Deflection Method 1
Page 35 and 36: 1.5 Fracture Mechanics of Thin Film
Page 37 and 38: Bibliography [1] Freund LB, Suresh
Page 39 and 40: Aim of the Dissertation The aim of
Page 41 and 42: Summary The main task of this disse
Page 43 and 44: involved, the incident angle, the i
Page 45 and 46: a new method that allows the straig
Page 47 and 48: 2 List of appended papers Paper A S
Page 49 and 50: A A Direct Method of Determining Co
Page 51 and 52: A.3 Experimental 840nm PVD-deposite
Page 53 and 54: A.4 Calculation Procedure and Resul
Page 61 and 62: A.5 Remarks on the Determined Stres
Page 63 and 64: A.5 Remarks on the Determined Stres
Page 65 and 66: A.6 Discussion of Possible Sources
Page 67 and 68: Bibliography to paper A [1] Eiper E
Page 69 and 70: B Stress Measurement in Thin Films
Page 71 and 72: B.2 Brief Description of the ILR Me
Page 73 and 74: B.3 Discussion of Sources of Error
Page 75 and 76: B.3.3 Accuracy of SEM Measurements
Page 77 and 78: B.4 Experimental Design to Minimize
Page 83 and 84: B.5 Determination of Young’s Modu
Page 85: [1] Massl S, Keckes J, Pippan R, Ac
Page 89 and 90: C.2 Experimental curved, which assu
Page 91 and 92: C.2 Experimental of residual stress
Page 93 and 94: C.3 Discussion and Concluding Remar
Page 95 and 96: [1] Nix WD. Metall Trans A 1989;20A
Page 97 and 98: D Investigation of Fracture Propert
Page 99 and 100: D.2 Experimental the bias voltage w
Page 101 and 102: D.2 Experimental Table D.1: The com
Page 103 and 104: D.3 Results Figure D.5: SEM picture
Page 105 and 106: D.4 Discussion Table D.3: Deflectio
Page 107 and 108: D.4 Discussion strength with. Kamiy
Page 109 and 110: D.5 Conclusion stresses, which disa
Page 111 and 112: Bibliography to paper D [1] Weppelm
Page 113 and 114: Bibliography to paper D [44] Ziegle
Page 115 and 116: E Mechanics of Residually Stressed
Page 117 and 118: E.2 Sign Convention Figure E.1: Ini
Page 119 and 120: E.4 Calculation of the Normal Stres
Page 121 and 122: E.5 Determination of the Position o
Page 123 and 124: E.6 Moment Balance Figure E.5: Forc
Page 125 and 126: E.8 Correlation of the Stresses in
Page 127 and 128: E.9 An Example: Depth Profile of Re
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