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1 - Erich Schmid Institute

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E<br />

Mechanics of Residually Stressed Coated<br />

Systems: Derivation of Basic Equations<br />

S. Massl a , J. Keckes b and R. Pippan a<br />

a <strong>Erich</strong> <strong>Schmid</strong> <strong>Institute</strong> of Materials Science, Austrian Academy of Sciences, A–8700<br />

Leoben, Austria<br />

b Department Materials Physics, University of Leoben, A–8700 Leoben, Austria<br />

Abstract<br />

The basic mechanical equations necessary for the description of depth profiles of residual<br />

stresses in coated systems and for the calculation procedure of the ion beam layer<br />

removal method developed are derived. Here, the stresses are assumed to originate from<br />

the difference of the coefficients of thermal expansion of the substrate and the thin film<br />

subjected to a temperature difference ∆T = 0. A sign convention is introduced in order<br />

to assure a uniform description of residually stressed systems. Finally, the stress profile<br />

of an arbitrary model system subjected to a temperature difference of ∆T = 300K is<br />

calculated and compared with Stoney’s equation. The most important equations are<br />

highlighted.<br />

E–1<br />

E

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