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Reflectivity (u.a)
1.0
0.8
0.6
0.4
0.2
0.0
sample as etched
after KOH treatment
after refresh in HF solution
600 800 1000 1200 1400
Wavelength (nm)
Figure 11: Reflectivity optical spectra of the porous silicon layer after KOH and HF treatments.
In this chapter, are presented some experimental results about sensing of chemical
substances, flammable and toxic organic solvents and also some hydrocarbons,
using several porous silicon optical structures with different pores structures.
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