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PhD Thesis_RuiMSMartins.pdf - RUN UNL

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In-situ XRD studies during growth of Ni-Ti SMA films and their complementary ex-situ characterization<br />

B2(110) => R-phase<br />

Intensity (arb. units)<br />

10 6<br />

10 5<br />

10 4<br />

10 7 R-phase<br />

H fN (111)<br />

R-phase<br />

HfN(200)<br />

200°C<br />

162°C<br />

138°C<br />

117°C<br />

100°C<br />

87°C<br />

67°C<br />

10 3<br />

14 15 16 17 18 19 20<br />

Scattering angle 2θ (deg)<br />

Fig. 3.82: XRD evaluation of phase transformation during cooling for the NiTiHf film<br />

from Fig. 3.80.<br />

These results have confirmed the advantage of the dual magnetron-sputtering-chamber<br />

installed at ROBL for future fabrication and characterization of ternary SMAs.<br />

Chapter 3 – Results 170

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