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In-situ XRD studies during growth of Ni-Ti SMA films and their complementary ex-situ characterization REFERENCES [1] K. Otsuka, T. Kakeshita, Science and Technology of Shape-Memory Alloys: New Developments, MRS Bull. 27 (2002) 91-100. [2] S. Miyazaki, S. Kimura, K. Otsuka, Shape Memory Effect and Pseudoelasticity associated with the R-phase transition in Ti-50.5 at-percent-Ni single crystals, Phil. Mag. A 57 (1988) 467-478. [3] T. Goryczka, H. Morawiec, Structure studies of the R-phase using X-ray diffraction methods, J. Alloys Compd. 367 (2004) 137-141. [4] D. Shindo, Y. Murakami, T. Ohba, Understanding precursor phenomena for the R- phase transformation in Ti-Ni-based alloys, MRS Bull. 27 (2002) 121-127. [5] J. Khalil-Allafi, W.W. Schmahl, D.M. Toebbens, Space group and crystal structure of the R-phase in binary NiTi shape memory alloys, Acta Mater. 54 (2006) 3171-3175. [6] H. Sitepu, W.W. Schmahl, D.M. Toebbens, Use of synchrotron diffraction data for describing crystal structure and crystallographic phase analysis of R-phase NiTi shape memory alloy, Textures and Microstructures 35 (2003) 185-195. [7] C. Gong, Y. Li, Y. Wang, D. Yang, Ab initio study for electronic and crystal structure of NiTi R-phase, Modelling Simul. Mater. Sci. Eng. 14 (2006) 33-39. [8] P. Šittner, M. Landa, P. Lukáš, V. Novák, R-phase transformation phenomena in thermomechanically loaded NiTi polycrystals, Mech. Mater. 38 (2006) 475-492. [9] A. Ishida, V. Martynov, Sputter-deposited Shape-Memory Alloy thin films: properties and applications, MRS Bull. 27 (2002) 111-114. [10] Y. Fu, H. Du, W. Huang, S. Zhang, M. Hu, TiNi-based thin films in MEMS applications: a review, Sens. Actuators A 112 (2004) 395-408. [11] M. Nishida, C.M. Wayman, T. Honma, Precipitation processes in near-equiatomic TiNi Shape Memory Alloys, Metall. Trans. 17A (1986) 1505-1515. [12] M. Nishida, C.M. Wayman, Phase transformations in Ti 2 Ni 3 precipitates formed in aged Ti-52 at. pct Ni, Metall. Trans. 18A (1987) 785-799. [13] T. Hara, T. Ohba, K. Otsuka, M. Nishida, Phase transformation and crystal structures of Ti 2 Ni 3 precipitates in Ti-Ni alloys, Mater. Trans. 38 (1997) 277-284. [14] K. Otsuka, X. Ren, Martensitic transformations in nonferrous shape memory alloys, Mater. Sci. Eng. A 273-275 (1999) 89-105. References 209
In-situ XRD studies during growth of Ni-Ti SMA films and their complementary ex-situ characterization [15] Y. Kudoh, M. Tokonami, S. Miyazaki, K. Otsuka, Crystal-structure of the martensite in Ti-49.2 at-Percent-Ni alloy analyzed by single-crystal X-ray diffraction method, Acta Metall. 33 (1985) 2049-2056. [16] K. Otsuka, X. Ren, Physical metallurgy of Ti-Ni-based shape memory alloys, Prog. Mater. Sci. 50 (2005) 511-678. [17] D. Wan, K. Komvopoulos, Thickness effect on thermally induced phase transformations in sputtered titanium-nickel shape-memory films, J. Mater. Res. 20 (2005) 1606-1612. [18] W. Tang, Thermodynamic study of the low-temperature phase B19’ and the martensitic transformation in near-equiatomic Ti-Ni Shape Memory Alloys, Metall. Mater. Trans. 28A (1997) 537-544. [19] J. Uchil, K.P. Mohanchandra, K.K. Mahesh, K. Ganesh Kumara, Thermal and electrical characterization of R-phase dependence on heat-treat temperature in Nitinol, Physica B 253 (1998) 83-89. [20] W.J. Buehler, J.V. Gilfrich, R.C. Wiley, Effect of low-temperature phase changes on the mechanical properties of alloys near composition TiNi, J. Appl. Phys. 34 (1963) 1475- 1477. [21] Y.Q. Fu, H.J. Du, Effects of film composition and annealing on residual stress evolution for shape memory TiNi film, Mater. Sci. Eng. A 342 (2003) 236-244. [22] J.J. Gill, D.T. Chang, L.A. Momoda, G.P. Carman, Manufacturing issues of thin film NiTi microwrapper, Sens. Actuators 93 (2001) 148-156. [23] S. Miyazaki, A. Ishida, Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films, Mater. Sci. Eng. A 273-275 (1999) 106-133. [24] A. Gyobu, Y. Kawamura, T. Saburi, M. Asai, Two-way shape memory effect of sputterdeposited Ti-rich Ti-Ni alloy films, Mater. Sci. Eng. A 312 (2001) 227-231. [25] R.M.S. Martins, Produção e caracterização de películas finas de Ni-Ti, Master <strong>Thesis</strong>, New University of Lisbon (2004). [26] R.M.S. Martins, F.M.B. Fernandes, R.J.C. Silva, L. Pereira, P.R. Gordo, M.J.P. Maneira, M. Beckers, A. Mücklich, N. Schell, The influence of a poly-Si intermediate layer on the crystallization behaviour of Ni-Ti SMA magnetron sputtered thin films, Appl. Phys. A 83 (2006) 139-145. [27] R.M.S. Martins, F.M.B. Fernandes, R.J.C. Silva, M. Beckers, N. Schell, Structural insitu studies of Ni-Ti thin films in: Proceedings of Shape Memory and Superelastic Technologies 2004 - October 2004, Baden Baden, Germany, edited by T.W. Duerig and A.R. Pelton (ASM International, 2006), pp. 421-426. [28] R.H. Wolf, A.H. Heuer, TiNi (Shape Memory) films on silicon for MEMS applications, J. Microelectromech. Syst. 4 (1995) 206-212. [29] P. Krulevitch, A.P. Lee, P.B. Ramsey, J.C. Trevino, J. Hamilton, M.A. Northrup, Thin film shape memory alloy microactuators, J. Microelectromech. Syst. 5 (1996) 270-282. References 210
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RUI MIGUEL DOS SANTOS MARTINS IN-SI
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ACKNOWLEDGEMENTS The research work
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At CENIMAT, Luís Pereira also carr
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SUMÁRIO O fabrico de películas fi
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LIST OF SYMBOLS AND ABREVIATIONS α
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TABLE OF CONTENTS Introduction ....
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LIST OF FIGURES Fig. 1.1: Power/wei
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Fig. 2.3: Calculated integrated pho
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Fig. 3.25: Pole figures of Ni-Ti B2
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Fig. 3.66: SAED pattern obtained on
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LIST OF TABLES Tab. 1.1: Factors af
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In-situ XRD studies during growth o
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