Edwards, nEXT Turbomolecular Pumps, nEXT240, nEXT300 and ...

B800-00-880 Issue B Contents Section Page 1 Introduction ....................................................................................... 1 Contents djd 26/10/09 1.1 Scope <strong>and</strong> definitions ................................................................................................... 1 1.2 General description ..................................................................................................... 2 1.3 Pump controller .......................................................................................................... 3 1.4 Operational features .................................................................................................... 3 1.4.1 Power limit setting ...................................................................................................... 3 1.4.2 St<strong>and</strong>by speed ............................................................................................................ 3 1.4.3 Timer ...................................................................................................................... 4 1.4.4 Analogue output ......................................................................................................... 4 1.4.5 Automatic vent options ................................................................................................. 4 1.4.6 Normal speed setting .................................................................................................... 5 1.5 Logic interface ........................................................................................................... 5 1.5.1 Parallel control <strong>and</strong> monitoring ....................................................................................... 5 1.5.2 Serial control <strong>and</strong> monitoring .......................................................................................... 5 1.5.3 Serial control with parallel monitoring ............................................................................... 6 1.5.4 Parallel control with serial monitoring or serial configuration ................................................... 6 1.5.5 Controller configuration (serial set-up) .............................................................................. 6 2 Technical data .................................................................................... 7 2.1 General ................................................................................................................... 7 2.2 Pumping media ........................................................................................................... 7 2.3 Vent gas specification <strong>and</strong> vent control data ......................................................................17 2.4 Purge gas specification ................................................................................................18 2.5 Cooling water ............................................................................................................18 2.6 Materials exposed to gases pumped .................................................................................18 2.7 Electrical data ...........................................................................................................19 2.8 Logic interface connector .............................................................................................19 2.9 Controller connector socket ..........................................................................................22 2.10 Indicator LED’s ..........................................................................................................23 2.11 Operating <strong>and</strong> storage environment .................................................................................23 3 Installation ....................................................................................... 25 3.1 Unpack <strong>and</strong> inspect .....................................................................................................25 3.2 Typical installation .....................................................................................................25 3.3 Connection to the vacuum system ...................................................................................26 3.3.1 Inlet-screen (supplied fitted on CF only) ............................................................................27 3.3.2 Mechanical fixing .......................................................................................................27 3.3.3 Inlet-connection <strong>and</strong> orientation .....................................................................................27 3.3.4 Base mounting ...........................................................................................................28 3.3.5 Backing connection .....................................................................................................28 3.3.6 Interstage connection (variants only) ...............................................................................29 3.4 Purge gas connection ...................................................................................................29 3.4.1 Connect the purge gas .................................................................................................29 3.4.2 Recommended purge gas flow ........................................................................................29 3.5 Electrical installation ..................................................................................................29 3.5.1 Introduction ............................................................................................................. 29 3.5.2 Earth (ground) connections ...........................................................................................29 3.5.3 Connect the logic interface to the TIC ..............................................................................29 3.5.4 Connect the logic interface to your control equipment ..........................................................30 3.5.5 Connect the electrical supply .........................................................................................30 3.6 Connection for parallel control <strong>and</strong> monitoring ...................................................................31 3.7 Connection for serial control <strong>and</strong> monitoring ......................................................................32 © <strong>Edwards</strong> Limited 2009. 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