Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
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Testing Selectivity of <strong>Etch</strong>ing <strong>Dielectric</strong><br />
over Tungsten using NDE<br />
Purposefully<br />
over-etched W<br />
lines are still<br />
protecting<br />
dielectric under<br />
them while<br />
dielectric around<br />
is removed down<br />
to poly layer<br />
Rough estimate of<br />
selectivity is ~ 4 - 6
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