Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
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<strong>Application</strong> of NDE <strong>for</strong> <strong>Circuit</strong> <strong>Edit</strong> on<br />
devices with Tungsten interconnects<br />
• Recently, new results arrived, regarding<br />
advantages of the NDE over XeF2 in CE on<br />
devices with Tungsten metallization<br />
This presentation shows these results.
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