Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
Novel Dielectric Etch Solution for FIB Circuit Edit: Application ... - Imec
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What NDE is good <strong>for</strong><br />
• Allows circuit editing on back-side devices<br />
with open silicon<br />
XeF2<br />
NDE
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