Nanosurf easyScan 2 AFM Operating Instructions

CHAPTER 3: PREPARING FOR MEASUREMENT
Sample specifications:
Size: 5 mm × 5 mm
Material: Silicon oxide on silicon
Structure: Square array of holes or hills in the silicon oxide layer
Period:
660 nm. Calibrated value of period (with 3% accuracy) is printed on the
package. Certified Calibration grids are available as an option.
60 nm
Figure 3-7: Structure of Grid: 660nm (version with holes)
Flatness sample
The Flatness sample is a polished silicon sample. It can be used for testing the Flatness of
the scanned plane.
Sample specifications:
Size: 5 mm × 5 mm
Material: Silicon
Thickness: Approx. 320 μm
CD-ROM piece
Sample for demonstrating the AFM imaging. The CD sample is a piece from a CD, without
any coating applied to it.
Sample specifications:
Material:
Structure:
Microstructure
660 nm
Polycarbonate
100 nm deep pits arranged in tracks that are spaced 1.6 μm apart.
Sample for demonstrating AFM imaging (no longer available). The microstructure is
approximately the negative of the Grid: 10μm / 100nm. It consists of holes in a silicon oxide
36