Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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p-type dopants: B activation with & without pre-amorphization1500BB+100keV GeR s(Ω/square)100050080 Ω/square0300 400 500 600Anneal temperature (ºC)• B highest activation (20%) takes place at low T in c-Ge (300 o C)• However, 60% activation achieved from a-Ge phase.• Increasing the B doping dose improves Rs (down to ~80 Ω-sq).
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