Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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Interface states … conflicting reportsin the literature <strong>and</strong> on the street• Ge diffuses into HfO 2 <strong>and</strong> degrades it as a dielectric… hafnium aluminates better but rare earth oxidesfavoured by some ….• nitrided germanium oxide good compromise as firststack layer• interface state density >10 12 cm -2 … not controllable• <strong>for</strong>ming gas anneal doesn’t work <strong>for</strong> most people• reasonable PMOS devices from Chui (Stam<strong>for</strong>d nowat INTEL)• no interface states seen in EPR … why?
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