Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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DLTS of Ge with low dose Si implant <strong>and</strong> annealΔC, pF43210Ge 0.9992Si 0.0008:P3 MeV Si ionsΦ = 1x10 10 cm -2U b= -5.0 VU p= 0 Vt p= 1 mse n= 80 s -1as implanted100 o C200 o C300 o Co400 CMESSAGE:much more complexspectrum <strong>and</strong> evolutionduring annealing thanirradiation case. Verysubstantial concentrationof generation centresremaining after 400 o Canneal50 100 150 200 250Temperature, K
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