Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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Irradiation damage removalΔC, pF0.50.40.30.20.1U b= -5.0 V; U p= -0.5 Vt p= 1 ms; e n= 80 s -1Ge:Sbas irradiated100 o C140 o C200 o C400 o C0.050 100 150 200 250Temperature, KDLTS of Ge:Sb as irradiated <strong>and</strong>annealed <strong>for</strong> 30mins at theindicated temperature. Similarmeasurements have been done onP, As <strong>and</strong> Bi doped material.MESSAGE:All irradiation inducedgeneration-recombinationcentres can be removedwith a very low thermalbudget
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