Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
SHOW LESS
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
p-type dopants Re-crystallization of pre-amorphized <strong>and</strong> B-doped GeSiO 2SiO 2SiO 220 nmα-Ge100 nmc-Ge20 nmAs-implantedDepth of amorphous layer: 100 nmSiO 2Annealed at 400 o C, 60s, N 2Fully re-grownNo detectable EOR defects20 nm
Change language