Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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dopants in germaniumMaximum equilibriumsolid solubility (600ºC) ofdopants in germaniumis much lower thanin silicon. For equilibriumB a 10nm implant will beexpected to give 30,000 Ω-sq.ITRS (Si) requirement <strong>for</strong>the 30nm node is 300 Ω-sq.<strong>for</strong> a 12nm implant… a long way off (~2orders) but Ga seems OK<strong>and</strong> P is nearMaximum Equil. Solid Solubility (cm -3 )Trumbore Bell Sys Tech J 39 (1960) 20510 2010 1910 18B Ga P As Sb10 21Doping Element
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