Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
Germanium Channels for CMOS ... Facts and Fantasies (pdf) - IM2NP
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ut beware of sputtering <strong>and</strong> vacancy clustering whichcause surface roughness <strong>and</strong> <strong>for</strong>m voids with heavy ionsvoids are 100nm deep after 10 15 Sb +at 70keVsurface roughness increases with ionmass … SiO 2 capping reducessputteringJanssens et al J. Vac Sci & Tech B 24p510 (2006)
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