IntelliSuite 8 - Europractice

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MEMaterialThin film knowledge base and processoptimization toolMEMaterial is the most comprehensivethin film database available today.Featuring over 70+ processes,MEMaterial links the material propertiesof thin films to the machine parameters.Use MEMaterial to• Obtain accurate material properties• Optimize your processes• Perform NxN dimensional multivariateanalyses• Create an organization wide processknowledge repository• Datamining of process data into information
32411. Capture. Create proprietarydatabases of material information(or use material informationfrom 70+ thin filmprocesses).2. Analyze. MEMaterial automaticallycreates informationfrom data using NxN dimensionmulti-variate estimationroutines.3. Explore. MEMaterial letsyou explore material propertiesas a function of machinesettings.Thin film properties of Si3N4 (PECVD, using Argon as a carriergas). The material properties (Stress, Density, CTE, Youngs modulus,Poisson’s ratio and Refractive Index) are shown as a functionof machine parameter (Temparature, pressure, total flow rate, RFpower, partial pressure of gases).4. Visualize. Advanced visualizationroutines allow you toquickly visualize any materialproperty as a function of machinesettings.
Page 1 and 2: IntelliSuite 8A living design envir
Page 3 and 4: Break open new possibilities in MEM
Page 5 and 6: System ArchitectDevice EngineerProg
Page 7 and 8: ProgramManagerSystem overview Metri
Page 9 and 10: Parametric Layout Virtual Prototypi
Page 11 and 12: Package creation toolsScripting too
Page 13: Process modeling
Page 17 and 18: Process traveller in IntelliFABis l
Page 19 and 20: Above: Corner compensation study. E
Page 21 and 22: Progression of an etch featuring th
Page 23 and 24: Physical modeling
Page 25 and 26: Built in scripting support allows y
Page 27 and 28: Combined IC and MEMS layout inone p
Page 29 and 30: 3D Builder allows you toimport soli
Page 31 and 32: Analysis tools
Page 33 and 34: Rotary ring gyroRate/Coriolis analy
Page 35 and 36: Client Corning IncApplication Fiber
Page 37 and 38: IntelliSuite allows you to model pi
Page 39 and 40: InletMembraneMicro-mixing in a valv
Page 41 and 42: Parametric optimization.Here a filt
Page 43 and 44: System model extractor (SME)Intelli
Page 45 and 46: SYNPLE — system simulationDevelop
Page 47 and 48: MEMS-SoC Constructor KitThe MEMS-So

IntelliSuite 8 - Europractice

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