IntelliSuite 8 - Europractice

AnisEAnisE is the industry standard for simulatingwet anisotropic silicon etching.AnisE makes it extremely easy to accuratelysimulate etch behavior. Importyour etch and doping masks, chooseyour wafer orientation and your processparameters, et voila, watch the etch progresson your screen.Use AnisE to• Simulate KOH/TMAH/Dry etching of and wafers• Perform corner compensation and processdeviation studies• Simulate multi-dope, multi-etch processes• Test your designs before entering the fab