IntelliSuite 8 - Europractice

RECIPERECIPE is industry’s first tool for RIE/ICP and Bosch process simulationWith RECIPE you can layout your microstructureand automatically simulateisotropic, RIE, ICP (Bosch process)etching or any combination of thethree processes.Use RECIPE to• Predict sidewall scalloping, roughness,periodicity and sidewall angle• Predict final dimensions and shape• Predict DRIE artifacts such as etchlag, etch termination (pinch-off)• Predict plate release• Custom tailor etch features such asbowl and stem etches to improvesidewall coverage• Perform multi-etch simulation suchas an isotropic etch followed by DRIEfollowed by RIE.