March CS 1701 RIE Operations and Maintenance Manual

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UNPACKINGCAUTION: COMPONENTS OF THE CS-1701 RIE SYSTEM ARE HEAVY. USEPROPER LIFTING PROCEDURES TO AVOID INJURY TO PERSONNEL.The CS-1701 Plasma System is completely tested and inspected at the factory beforeshipping. Inspect all shipping cartons before unpacking. If there is any reason tosuspect damage to the cartons or their contents, make note of the damage and report itto the shipping company immediately.Using the included packing list, check to ensure that all listed components have arrivedat your facility. Unpack the shipping cartons carefully and inspect the main plasma unitand all other system components for any damaged or missing items.If any component is damaged or missing, notify the shipper and notify the MarchInstruments Customer Service Department by telephone (925 827 1240) or FAX (925827 1189) immediately. Claims based on late notification of shipping damage will bedenied.Keep all shipping containers and materials in case it should be necessary to return anyitem to March.Place the system components on the selected work surfaces. Remove all packingmaterials including any that might be present in the chamber of the system.LONG TERM STORAGEIf the plasma system and vacuum pump are to be placed in long term storage, take thefollowing precautions in order to keep the equipment in good working condition.All system components should be placed in protective packaging. A desiccant shouldbe placed in the packaging to minimize moisture exposure. Storage should be in a roomwith humidity less than eighty percent.Before packaging and storing the vacuum pump, fill the pump reservoir with oil to theproper level and run the pump for five minutes to lubricate the seals. During the timethe pump is stored, you will also need to run the pump for five minutes every threemonths in order to keep the seals lubricated.10
INSTALLATIONThe following section outlines the requirements for system installation, recommendedworking area allowance, step by step instructions for assembly, and initial startupprocedure. The installer should refer to Safety Warnings and Precautions andUnpacking sections on pages 8 and 10 before beginning installation.FACILITIES REQUIREMENTSThe specifications and requirements for the system and applicable options are listed inthe following table. To aid in facilitizing the system, see the diagrams on pages 13 and14 for the recommended working area allowance and equipment hook-up dimensions(standard 6” chamber). All power cords are supplied by March Instruments.ETCHER:Power Supply:..................... Single Phase 110VAC or 220VAC +/-10%(Specified at time of order). 50-60 Hz @ 15Amps. 18 AWG, 3 wire.Process Gases:..................... Regulated to 10-15 PSIG. Connections madeby either .25” O.D. Stainless Steel or Teflontubing (Supplied by purchaser).Purge Gas:........................... Nitrogen or Compressed Dry Air regulated to45 PSIG (Gas, regulators and .25” tubingsupplied by purchaser).External Gas Fittings:.......... Swagelok compression fittings, .25” O.D.Cooling................................ Distilled waterRF GENERATOR:RFX-600:Power Supply:..................... Single Phase 110VAC or 220VAC +/-10%. 50-60 Hz @ 15 Amps. 14 AWG, 3 wire.Power Output:..................... 600 Watts +/-2% @ full load output into 50Ohm impedance.Dimensions:........................ 8.5”W x 7”H x 18”L.SEREN R300:Power Supply:..................... Single Phase 100-125VAC. 50-60 Hz, 14AWG, 3 wire.Power Output:..................... 300 Watts full load output into 50 Ohmimpedance.Dimensions:........................ 8”W x 5.25”H x 16”D.MPS 300:Power Supply:..................... Single Phase 110VAC or 220VAC +/-10%. 50-60 Hz @ 15 Amps. 14 AWG, 3 wire.Power Output:..................... 300 Watts +/- 5% @ full load output into 50Ohm impedance.Dimensions:........................8.5”W x 7”H x 18”L.11
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9: PROCESS GASESCertain process gases
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62:
Table 4.5 (Continued) RF System Tro
Page 63 and 64:
MaintenanceNo regular maintenance i
Page 65 and 66:
0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68:
4. Turn off RF power.5. To adjust o
Page 69 and 70:
APPENDIXThe appendix is a collectio
Page 71 and 72:
PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74:
GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76:
4. When the programmed gas percenta
Page 77 and 78:
As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
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