March CS 1701 RIE Operations and Maintenance Manual

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SHIPPINGBRACKETBRACKETSCREWSIDE VIEW OF SEREN GENERATOR FIGURE 1.10. If the system has an eight inch chamber, connect the compression fitting labeled“VAC. VALVE” on the rear of the system to the vacuum valve fitting (see Figure 3,previous page) using the tubing provided.11. If the system has an eight inch chamber, connect the compression fitting labeled“PRESS.” on the rear of the system to the pressure fitting beneath the chamber(see Figure 3) using the tubing provided.12. If the system has a pneumatic lift lid, connect the compression fitting labeled “LID”on the rear of the system to the pneumatic lid fittings on the cylinders at either sideof the chamber (see Figure 3) using the “T” connection and tubing provided.13. Connect the supplied grounding strap from the RF Generator to the GROUNDINGSCREW on rear of the etcher.14. If a host computer is to be used for downloading process parameters or controllingthe operation of the etcher, connect a serial communication line to the D typeRS232 connector labeled "RS-232" on the back of the etcher.15. If a gas cabinet was purchased with the system (for running toxic gases), connectthe data bus cable between the D type connector labeled "EXT. GAS" on thesystem rear panel and the D type connector on the process gas box.16. Connect the two COOLING WATER FITTINGS on the rear of the chamberpedestal to a chilled water source. Connect one line to water cooling return and theother to water cooling supply.NOTE: SUPPLYING CHILLED WATER IS MANDATORY TO PREVENT DAMAGE TOTHE ETCHER. USE DISTILLED WATER ONLY. TAP OR DEIONIZED WATER MAYCAUSE CORROSION OR BUILD-UP IN THE CIRCULATION LINES.17. Connect RF Power Generator power cord to an electrical source.18. Connect the system power cord to the POWER CORD SOCKET on the systemrear panel. Connect the other end of the power cord to a voltage source.19. After ensuring the exhaust line is connected properly, connect the vacuum pumppower cord to a voltage source. Pump exhaust should have an exhaust line thatvents outside of the facility. Some of the more hazardous gases may require theuse of an exhaust scrubber.16
Assembly Diagram- Standard 6” and 8” System5 166MARCHModel13InstrumentsIncorporatedConcord, CASerial No.PowerGAS 1 GAS 2 GAS 3 GAS 4GAS OU T E ND PT . DE T .PRESSURECONT R OLNIT ROGE N4RF GENEXT. GASRS -2321A S BRF IN3 329181 813Process Gases Nitrogen or(15 psi min, Dry Air20 psi max) (50 psi min,80 psi max)Rear of RFX-600 GeneratorVacuum Pump17
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15: SYSTEM ASSEMBLYTo facilitize the sy
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68:
4. Turn off RF power.5. To adjust o
Page 69 and 70:
APPENDIXThe appendix is a collectio
Page 71 and 72:
PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74:
GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76:
4. When the programmed gas percenta
Page 77 and 78:
As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
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March CS 1701 RIE Operations and Maintenance Manual

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