March CS 1701 RIE Operations and Maintenance Manual

TABLE OF CONTENTSINTRODUCTION...............................................................................................4Equipment Options .................................................................................5SAFETY ............................................................................................................7Safety Features ......................................................................................7Warnings and Precautions .....................................................................8UNPACKING .....................................................................................................10Long Term Storage.................................................................................10INSTALLATION.................................................................................................11Facilities Requirements ..........................................................................11Recommended Working Area Allowance ...............................................13Hook-up Connections .............................................................................14System Assembly ...................................................................................15Initial Start-up..........................................................................................19EQUIPMENT ORIENTATION............................................................................21General Equipment Description..............................................................21Controls and Indicators...........................................................................24THEORY OF OPERATION ...............................................................................32The Plasma Process: An Overview ........................................................32SETUP ..............................................................................................................35Gas Flow.................................................................................................35Independent Pressure Control................................................................35Tuning the RF Matching Network ...........................................................36Endpoint Detection .................................................................................37PROCESS PROGRAMMING ............................................................................38Manual Operation ...................................................................................38Automatic Operation...............................................................................40SERVICE AND MAINTENANCE .......................................................................42Warranty .................................................................................................42Servicing .................................................................................................43User Maintenance...................................................................................45System Troubleshooting .........................................................................50Tuning and Replacement Procedures ....................................................62Consumables..........................................................................................68APPENDIX ........................................................................................................69Process Development- Etching...............................................................69Pump Down Speed.................................................................................71Calculating Gas Flow..............................................................................71Independent Pressure Control................................................................74Avoiding Gas Line Contamination ..........................................................78GLOSSARY.......................................................................................................79NOTES ..............................................................................................................84SCHEMATICS...................................................................................................86MATERIAL SAFETY DATA SHEET3