March CS 1701 RIE Operations and Maintenance Manual

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VACUUM PUMPCapacity:.............................2063 50 CFM or 2033CP 27 CFM (27 CFMminimum recommended).Power Supply:..................... 2063CP - Three Phase 220VAC +/-10% @ 50-60 Hz and 10 Amps. 14 AWG, 4 wire.2033CP - Single Phase 110VAC or 220VAC+/-10% @ 50-60 Hz and 15 Amps. 14 AWG, 3wire.Lubricant:...........................Exhaust:.............................Dimensions:.......................Charged with either Perfluorinated Krytox orFomblin oil.NW-40 connection (1.5” exhaust tubingsupplied by purchaser).2063CP - 32” L x 18”H x 10”W.2033CP - 30” L x 14”H x 8”W.Optional EquipmentPUMP OIL FILTRATION UNIT:Power Supply:..................... Single Phase 110VAC or 220VAC +/-10%. 50-60 Hz @ 8 Amps. 14 AWG, 3 wire.Dimensions:........................ 13”W x 14.5”H x 17.5”L.CHILLER:Power Supply:..................... Single Phase 110VAC* +/-10%. 50-60 Hz @15Amps. 14 AWG, 3 wire.Output:............................... 2 GPM @ 6 PSI.Connections:....................... Swagelok fittings, .25” O.D. (Either .25”Stainless Steel or Teflon tubing supplied bypurchaser).Dimensions:........................Temperature:......................25.5”W x 12”H x 25”L.50-60 Degrees F. Distilled water only.CONTACT ANGLE MEASURING SYSTEM:Power Supply:..................... Single Phase 110VAC or 220VAC +/-10%. 50-Dimensions:........................60 Hz @ 2 Amps. 3 wire, 14 AWG.*11”W x 16”H x 22.5”L.NOTE: ALL CONNECTIONS FOR PROCESS GAS BETWEEN GAS BOTTLES ANDCS-1701 MUST BE MADE USING CORROSION RESISTANT MATERIALS SUCH ASTEFLON OR STAINLESS STEEL. OTHER MATERIALS CAN CORRODEGENERATING PARTICULATE MATTER WHICH WILL CLOG GAS SHUTOFFVALVES AND MASS FLOW CONTROLLERS.* 220VAC with external transformer supplied with system.12
RECOMMENDED WORKING AREA ALLOWANCEThe following diagram outlines the minimum recommended working space recommendedfor the CS-1701 system.VACUUM VALVERF GENERATORTOP VIEWDepth=24 in./61 cmFRONT OF ETCHERWidth=36 in./91.5 cm13
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11: INSTALLATIONThe following section o
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64:
MaintenanceNo regular maintenance i
Page 65 and 66:
0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68:
4. Turn off RF power.5. To adjust o
Page 69 and 70:
APPENDIXThe appendix is a collectio
Page 71 and 72:
PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74:
GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76:
4. When the programmed gas percenta
Page 77 and 78:
As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
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