March CS 1701 RIE Operations and Maintenance Manual

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12. Switch to the set mode for time (left display) and enter the process time of 120seconds (2 minutes) into the process controller.13. The process is now entered in the controller memory and ready to run in automaticmode.14. To end the process, press the RF ON button to shut down the RF power, thenpress the GAS ON button to shut down the gas flow. Both the RF ON and GASON LEDs will extinguish.15. In order to vent the chamber back up to atmospheric pressure, press the BLEEDbutton. The unit will pump down to a preset base pressure (BLEED button LED willblink while the VAC ON and PRESS button LED's remain steady) before ventingback to atmosphere.AUTOMATIC OPERATIONProgramming a process in the automatic mode is accomplished the same way as in themanual mode. But running in the automatic mode is different in that parameters cannotbe changed during a process. Also the Process Controller will automatically shut downthe RF power and gas flow at the end of the process and bleed the chamber back toatmospheric pressure.1. Toggle the PROGRAM button to select the program step in which you wish toenter your desired process parameters (generally program 1). There are 9program channels available.2. Depress the MAN OP switch to select Automatic mode of operation (LEDextinguished).3. To program the gas settings, use the R DISP switch:a) Toggle the R DISP switch to read the desired gas channel.b) Toggle the gas SET/READ switch to the SET position (LED illuminated).c) Adjust the gas set point by using the INCR/DECR buttons.d) Toggle the gas SET/READ switch to the READ position (LED extinguished).4. To program all other process parameters, use the L DISP switch:a) Toggle the L DISP switch to read PRESS. Toggle the SET/READ switch to theSET position (LED illuminated). Adjust PRESS to zero using INCR/DECRunless Independent Pressure Control is desired (See Independent PressureControl, page 74 for instructions on how to set this parameter).b) Toggle the L DISP switch to the PWR position. Adjust the RF power to thedesired level in the same manner as above (make sure remote control andremote signal on the RF Power Generator are activated if using the RFX 600).c) Toggle the L DISP switch to the ENDPT position. If you desire to set anendpoint, refer to Endpoint Detection, page 37 for guidelines. Otherwise, ensureENDPT value is set at 100 (default setting to deactivate this option).40
d) Toggle the L DISP switch to the TIME position. Adjust the process time todesired length in seconds using the DECR/INCR switch.e) Toggle the L DISP to BP/RP (Base Pressure/Reflected Power). Adjust thissetting for the desired chamber evacuation pressure level (Base Pressure) thatmust be reached before gas flow can be activated (typically 50-150 mTorr).5. Select the next program step, if any, you wish to program into the ProcessController by toggling the PROGRAM button.6. Repeat the above steps until all programs that you intend to usesequentially to complete a process have been entered.7. When your final process step has been entered, advance to the next programnumber and toggle the L DISP switch to the TIME position. Use the INCR/DECRswitches to adjust this program's TIME value to zero.8. Depress SET/READ to READ (the LED will be extinguished). This storesparameters in the Process Controller memory.9. Toggle PROGRAM to the beginning program number in the process sequence.10. Push START.The system is now running the process in Automatic mode. The Process Controller willvacuum down the reactor to the base pressure, turn on gas flow, turn on RF power, andprocess the sample until the programmed time has elapsed. The controller will thenread the TIME setting in the next program number to evaluate whether to proceed withan additional program step. If a TIME value greater than zero is found, the ProcessController will load the next program's parameters and start that program; if not, theProcess Controller will turn off the RF power and gas flow. The system will then pumpdown to a preset base pressure and vent to atmospheric pressure.The amount of time remaining and the actual conditions of power, pressure, reflectedpower, and gas flow in the chamber can be monitored at any time during the course ofthe process:1. Toggle the SET/READ to READ position (LED extinguished).2. Toggle the L DISP for PRESS, POWER, TIME and RP parameter readings asdesired.3. Toggle the R DISP for GAS1-GAS6 percent flow readings.41
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39: NOTE: IF THE “PRESS” BUTTON HAS
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68: 4. Turn off RF power.5. To adjust o
Page 69 and 70: APPENDIXThe appendix is a collectio
Page 71 and 72: PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74: GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76: 4. When the programmed gas percenta
Page 77 and 78: As long as Independent Pressure Con
Page 79 and 80: GLOSSARYThe following lists definit
Page 81 and 82: Plasma: A highly energetic state of
Page 83 and 84: Ultraviolet (UV) Light: The region
Page 86 and 87: SCHEMATICSThe following pages are t

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