March CS 1701 RIE Operations and Maintenance Manual

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DATE:CHAMBERCLEANINGCS-1701 MAINTENANCE CHECKLISTVACUUMCHECKPUMP OILCHECKPUMP OILCHANGE48
CS-1701 GAS FLOW DIAGRAM49
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47: 6. Unscrew the drain plug and drain
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68: 4. Turn off RF power.5. To adjust o
Page 69 and 70: APPENDIXThe appendix is a collectio
Page 71 and 72: PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74: GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76: 4. When the programmed gas percenta
Page 77 and 78: As long as Independent Pressure Con
Page 79 and 80: GLOSSARYThe following lists definit
Page 81 and 82: Plasma: A highly energetic state of
Page 83 and 84: Ultraviolet (UV) Light: The region
Page 86 and 87: SCHEMATICSThe following pages are t

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