March CS 1701 RIE Operations and Maintenance Manual

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SYSTEM TROUBLESHOOTINGThis section is a troubleshooting guide for the various components in the systemalong with a listing of the necessary tools. The SEMI S2-93 level of hot work isalso given for any maintenance procedure that must be performed with thesystem electrically energized.ERROR INDICATORSA flashing LED on the system front panel indicates that the system was unableto achieve the setpoint for a process parameter. The error indicators, with theexception of “PRESSURE” are active only when the system is operated in theautomatic processing mode. If an error is triggered during automatic processing,the process will stop.Pressure:A flashing “PRESSURE” LED indicates that the pressure setpoint was notachieved in the time period allowed by the internal settings. A pressure error canoccur under any of the following conditions:1. The base pressure set by the operator was not achieved within five minutesafter pressing the START button.2. The Independent Pressure Control (IPC) is improperly set. Remember that ifyou do not want to use IPC, the “PRESSURE” setting should always be zero.When using IPC, the error indicator will be activated if the “PRESSURE”setting is either too low or too high to be achieved at the set gas flow (seeIndependent Pressure Control section for details).3. The chamber pressure is above 2000 mT or below 50 mT.Power:A flashing “POWER” LED indicates that the “POWER” setpoint was not achievedwithin 45 seconds. Possible causes:1. Plasma system autotuning is not functioning properly, causing excessivereflected power.2. RF generator is defective.Gas:A “GAS” (Gas1, Gas 2, etc.) LED will flash if the gas flow for that gas channel isconsistently more than 5 percent above or below the setpoint. Possible causes:1. Valve on the gas cylinder is closed or the gas cylinder is empty.2. Mass flow controller is defective.50
TOOL REQUIREMENTSWARNING: BEFORE BEGINNING ANY REPAIR OR MAINTENANCERELATED PROCEDURE THAT REQUIRES REMOVAL OF EXTERNALPANELS, DISCONNECT THE POWER AND APPLY THE APPROPRIATELOCKOUT DEVICE TO THE POWER PLUG IN ORDER TO PREVENTREENERGIZATION OF THE EQUIPMENT.The following tools will be required at one time or another to perform thetroubleshooting procedures in this section. Some tools can be used in place ofothers, i.e. adjustable wrench in place of a 9/16 wrench.1.) Digital Voltmeter capable of reading 0-230VDC, 0-230VAC, Continuity, andResistance from 0-2M OHM.2.) Watt meter capable of reading 0-1000 Watts at 13.56Mhz.3.) Open end wrenches consisting of the following:3/16”, 1/4”, 5/16”, 3/8”, 7/16”, 1/2”, 9/16”, 5/8”, 11/16”, 3/4”.4.) Allen wrench set consisting of the following:.050”, 1/16”, 5/64”, 3/32”, 7/64”, 1/8”, 9/64”, 5/32”, 3/16”, 7/32”, 1/4”, 5/16”.5.) Slotted screwdriver set consisting of the following:1/8” X 2” blade, 3/16” W X 1 1/4” L blade, 5/32” W X 4” L blade, 1/4” W X4” L blade, 3/16” W X 6” L blade, 5/16” W X 6” L blade.6.) Phillips screwdriver set consisting of the following:#0 X 2” blade, #1 X 2 3/4” blade, #2 X 3 3/4” blade, #1 X 10” blade, #2 X10” blade, #1 X 1 1/4” blade, #2 X 1 3/8” blade.7.) 4” and 6” pair of wire cutters.8.) 5” and 6 3/4” pair of needlenose pliers.9.) 1 pair of 10” tongue and groove pliers.10.) Nut driver set consisting of the following:3/16”, 7/32”, 1/4”, 9/32”, 5/16”, 11/32”, 3/8”, 7/16”, 1/2”, 9/16”.11.) 4” adjustable wrench.12.) 10” adjustable wrench.13.) 1 pair of slip joint pliers.14.) 1 pair of wire strippers capable of stripping from AWG 24 to AWG10 wiresizes.15.) 1/4” Swagelok fitting caps, 4 ea.DEFINITION OF HOT WORK LEVELSThese definitions apply to Hot Work Levels referred to in the followingTroubleshooting and Replacement Procedures sections.LEVEL 3: Equipment is energized. Live circuits are exposed and accidentalcontact is possible. Potential exposures are less than 30 volts RMS, 42.2 voltspeak, 240 volt-amps, and 20 Joules.LEVEL 4: Equipment is energized. Live circuits are exposed and accidentalcontact is possible. Voltage potentials are greater than 30 volts RMS, 42.2 voltspeak, 240 volt-amps, and 20 Joules or RF is present.51
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49: CS-1701 GAS FLOW DIAGRAM49
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68: 4. Turn off RF power.5. To adjust o
Page 69 and 70: APPENDIXThe appendix is a collectio
Page 71 and 72: PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74: GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76: 4. When the programmed gas percenta
Page 77 and 78: As long as Independent Pressure Con
Page 79 and 80: GLOSSARYThe following lists definit
Page 81 and 82: Plasma: A highly energetic state of
Page 83 and 84: Ultraviolet (UV) Light: The region
Page 86 and 87: SCHEMATICSThe following pages are t

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