March CS 1701 RIE Operations and Maintenance Manual

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A gas flow interlock prevents gas flow into the chamber until the vacuum switch hasbeen activated. This prevents potentially flammable or toxic gases from flowing whilethe system is at atmospheric pressure.CHAMBERAfter each operation, there is an automatic pump down and purge cycle to remove anyresidual process gases from the chamber before venting to atmospheric pressure.RF POWERThe system meets OSHA and FCC requirements for RF leakage, and operates at anassigned frequency of 13.56 MHz.WARNINGS AND PRECAUTIONSWhen used properly, your CS-1701 plasma system is very safe. The purpose of thisadvisory is simply to point out possible hazards resulting from misuse of the equipmentand to suggest ways of operating the equipment as safely as possible.ELECTRICALAs with all electrical equipment, caution is warranted whenever any external panels areremoved and/or electrical wiring is exposed. Only qualified technicians should performmaintenance, repair or installation on the equipment. Per OSHA 29 CFR 1910.147(Control of Hazardous Energies, Lockout/Tagout), if possible the equipment should bedisconnected from the power source and a lockout device attached to the electricaldisconnect before beginning any work. The lockout device prevents reenergization ofthe equipment while the maintenance/repair is occurring.RADIO FREQUENCY (RF) EXPOSUREA potential hazard from RF exposure exists if the system is operated without theexternal cover in place. This is not recommended. This system runs at an RF frequencyof 13.56 Mhz and the standard RF generator runs at a maximum power of 600 watts.CHAMBER TEMPERATUREThe reaction chamber requires cooling water, exact requirements are noted in themanual. Even with this cooling, the temperature of the inside of the reaction chambercan be hot enough to burn. The operator should use gloves or tools to remove treatedsamples from the chamber.CHEMICAL HAZARDSThe fluorinated pump oil (Krytox) is a skin and eye irritant. Gloves and eye protectionshould be used when changing or adding pump oil.The Material Safety Data Sheet for Krytox is included for reference at the back of themanual.8
PROCESS GASESCertain process gases selected for use with this equipment may be hazardous. Somemay require special precautions. These precautions vary depending on the gas.Consult with your safety officer to ensure proper precautionary steps are taken beforebringing any new gas into your facility. When using any gases considered to be ahazard, we recommend that the system be operated only in a fume (exhausted) cabinetso that if there is any leakage of gas, it will be directed out of the work area. Dependingon the level of hazard and the nature of the gas, the exhaust from the fume cabinetmay need to be treated (scrubbed) before being released to the outside. In addition,the cylinder of any gas that is toxic or corrosive should be placed in a suitable gascabinet. Please check with your safety officer to see what regulations andspecifications are required for the gas cabinet.Take care to insure that gas lines containing toxic or flammable gases do not leak. Gasline integrity can be confirmed simply by opening the valve on the gas cylinder thenquickly closing it again. If the pressure reading on the regulator drops within oneminute, there is a substantial leak that could be dangerous.PUMPThe pump must be if a design that is suitable for use with the process gases. Corrosivegases require a chemical series pump. Oxygen requires the use of a non-hydrocarbonpump fluid (Fomblin or Krytox). The pump exhaust can contain various levels of toxicgases and particulates. It is always recommended that the exhaust of the pump beeither filtered, or directed away from the work area. Again, depending on the gasesused, the exhaust of the pump may also have to be scrubbed.PLUMBINGAll tubing and connections between process gas supplies and the etcher must be madeof corrosion resistant materials. Only stainless steel or Teflon should be used. All gasconnections should be checked for leakage as outlined in the manual.9
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7: SAFETYThis section covers the safet
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60:
B.) (Continued)Table 4.4 (Continued
Page 61 and 62:
Table 4.5 (Continued) RF System Tro
Page 63 and 64:
MaintenanceNo regular maintenance i
Page 65 and 66:
0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68:
4. Turn off RF power.5. To adjust o
Page 69 and 70:
APPENDIXThe appendix is a collectio
Page 71 and 72:
PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74:
GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76:
4. When the programmed gas percenta
Page 77 and 78:
As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
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March CS 1701 RIE Operations and Maintenance Manual

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