March CS 1701 RIE Operations and Maintenance Manual

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CONTROLS AND INDICATORSThis section describes the controls and indicators on the CS-1701 system components.PROCESS CONTROLLER/CHAMBERThe following is a description of the controls and indicators on the CS-1701 ProcessController/Chamber module. Each control and indicator is numbered on Figure 4 (page25).Powering Up and Powering Down System1. POWER. Removes all power from the unit. This is a momentary action switchwhich sets the main power relay to the off state. Serves as an emergency stop.Chamber Access and Plasma Observation2. Upper Chamber Lid Handle. When the chamber is at atmospheric pressure, openthe chamber by grasping this handle and lifting. When the chamber lid is fully upright, itsettles into slots which keep it open. To close the chamber, grasp the handle and lift thelid approximately .5 inch to elevate it out of the slots, then lower it to pivot it back intothe closed position.3. Plasma Viewport. Quartz window which allows observation of the Plasma Process.Process Parameter Selection and Monitoring4. L DISP. Toggles the left display (see #9) through analog read outs of pressure, RFpower, etch time, temperature, base pressure/reflected power, and endpoint. Theilluminated LEDs to the right of the legends PRESS, POWER, ENDPT, TIME, TEMP,and BP/RP indicate which specific parameter is being displayed. Blinking read outindicates that the system was unable to achieve the setpoint (see Troubleshooting).5. R DISP. Toggles the RIGHT DISPLAY (see #10) through analog read outs of gaschannel percent set points and flow rates (0 to 100%). The specific gas channelbeing displayed is indicated by the LED to the right of the legends GAS 1, GAS 2,GAS 3, GAS 4, GAS 5, and GAS 6. After toggling through each individual gassetting, a final position does not display set and read digits but displays all gaschannels that have a setpoint greater than 0. Blinking read out indicates that thesystem was unable to achieve the setpoint (see Troubleshooting).NOTE: ALTHOUGH THE DISPLAY CAN PROVIDE READINGS FOR AS MANY AS 6GASES, ONLY THOSE GAS CHANNELS ACTUALLY CONNECTED WITH MASSFLOW CONTROLLERS (MFCS) CAN BE MONITORED OR VARIED. IF THE UNITHAS ONLY TWO MFCS, ONLY THE FIRST TWO GAS CHANNELS SHOULD BEPROGRAMMED OR MONITORED. ALL OTHERS SHOULD BE SET TO, AND LEFTAT A VALUE OF ZERO.6. SET/READ. Two switches, one for the parameters displayed on the LEFTDISPLAY (#9), the other for the parameters displayed on the RIGHT DISPLAY(#10). Toggles the display parameters between the SET and READ modes.24
In the SET mode (indicated by the switches LED being illuminated) the processparameter shown in the display is the analog set point programmed by the operator intothe Process Controller software.In the READ mode (LED not illuminated), the value displayed is the monitored analogoutput (the actual value at that given moment) reported to the Process Controller by thespecific controlling device (pressure gauge, mass flow controller, etc.)23910MARCH CS-17012314 1546 561181278 71212213 16 17 18 1920FIGURE 4.- System Controls and Indicators7,8. DECR/INCR. Two sets of two switches, one set for parameters displayed on theLEFT DISPLAY, the other for parameters displayed on the RIGHT DISPLAY. TheDECR and INCR momentary switches are used to vary the value of the analog set pointthe Process Controller sends to the appropriate controller. By depressing theappropriate switch the controller will increase or decrease the set value on the displaylogrithmically (first by altering the value of the ones column until a value of ten isreached, then the tens column until one hundred is reached, then the hundredscolumn).25
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23: RADIO FREQUENCY POWER GENERATOR AND
Page 27 and 28: • This will continue until the Pr
Page 29 and 30: ADVANCED ENERGY RFX-600: FRONT PANE
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68: 4. Turn off RF power.5. To adjust o
Page 69 and 70: APPENDIXThe appendix is a collectio
Page 71 and 72: PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74: GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76:
4. When the programmed gas percenta
Page 77 and 78:
As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
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