March CS 1701 RIE Operations and Maintenance Manual

More documents

Recommendations

Info

Tuning Mode Selection and Accomplishment21. AUTO/MAN. Selection of Manual (user controlled) or Automatic (computercontrolled) Tuning Mode is accomplished by placing the switch in the AUTO or MANposition.22. C1 & C2. If the Manual tuning mode has been selected, toggling of these switchescontrols the positioning of the air capacitors of the impedance matching network.23. DOOR. This push button is included only on systems with the pneumatic lift lid. Itopens and closes the lid.GENERATOR CONTROLS AND INDICATORSA description of the controls and indicators on the Advanced Energy RFX-600 andSeren R300 are listed on the following three pages.28
ADVANCED ENERGY RFX-600: FRONT PANELFWD PWR1513REFL PWR18TRUE PWR16MAX PWR19DC BIAS1712 14ANGLE20OUTPUT DISPLAY POWER LIMIT POWER LEVEL6 7 8 9 10 111 2 3 4 5CONTROL REGULATION REMOTES1. POWER - Applies power to internal circuitry. LED off = power off, LED on = power on.2. FWD PWR/LOAD PWR - Provides Forward Power regulation control.3. DC BIAS/LOAD PWR - Provides DC Bias regulation control. Hole above switch is to adjust scalefrom 0-1000 volts. Pressing both switches #2 and #3 to light LEDs will cause the load to regulatepower.4. REMOTE CONTROL - When depressed allows the generator RF to be turned on and off remotelythrough the 25 pin connector on back.5. REMOTE SIGNAL - When depressed allows the power output level to be controlled remotelythrough the 25 pin connector. With microprocessor, PCM REMOTE SIGNAL can be used.6. RF OFF - Turns off RF when generator is not in REMOTE CONTROL operation.7. RF ON - Turns on RF when generator is not in REMOTE CONTROL operation.8. LEFT DISPLAY - Controls what is displayed on LEFT DISPLAY. Each time switch is pushed it willcycle through FRWD PWR, (15); LOAD PWR, (16); and DC BIAS, (17).9. RIGHT DISPLAY - Controls what is displayed on RIGHT DISPLAY. Each time switch is pushed itwill cycle through REFL PWR, (18); MAX PWR, (19); and PHASE ANGLE, (20).10. SETPOINT - When depressed will allow power output level to be set when not in REMOTESIGNAL operation. The level will be displayed on the LEFT DISPLAY. Hole above switch will setmaximum power out of the generator.11. POWER LEVEL - Controls power output of the generator when not in REMOTE SIGNAL operation.12. LEFT DISPLAY13. REFLECTED POWER BAR - Displays reflected power with bar graph LEDs.14. RIGHT DISPLAY29
Page 3 and 4: TABLE OF CONTENTSINTRODUCTION......
Page 5 and 6: EQUIPMENT OPTIONSThis is a list of
Page 7 and 8: SAFETYThis section covers the safet
Page 9 and 10: PROCESS GASESCertain process gases
Page 11 and 12: INSTALLATIONThe following section o
Page 13 and 14: RECOMMENDED WORKING AREA ALLOWANCET
Page 15 and 16: SYSTEM ASSEMBLYTo facilitize the sy
Page 17 and 18: Assembly Diagram- Standard 6” and
Page 19 and 20: INITIAL STARTUP PROCEDUREAfter the
Page 21 and 22: EQUIPMENT ORIENTATIONThis section i
Page 23 and 24: RADIO FREQUENCY POWER GENERATOR AND
Page 25 and 26: In the SET mode (indicated by the s
Page 27: • This will continue until the Pr
Page 31 and 32: SEREN R300: FRONT VIEWFWD/SET1REFL2
Page 33 and 34: BASIC ELEMENTS OF PLASMA TREATMENTT
Page 35 and 36: SETUPThis section describes the dif
Page 37 and 38: ENDPOINT DETECTIONThe chamber mount
Page 39 and 40: NOTE: IF THE “PRESS” BUTTON HAS
Page 41 and 42: d) Toggle the L DISP switch to the
Page 43 and 44: SERVICINGIf a March Instruments, In
Page 45 and 46: USER MAINTENANCEUser-performed main
Page 47 and 48: 6. Unscrew the drain plug and drain
Page 49 and 50: CS-1701 GAS FLOW DIAGRAM49
Page 51 and 52: TOOL REQUIREMENTSWARNING: BEFORE BE
Page 53 and 54: B.) (Continued)Table 4-1.(Continued
Page 55 and 56: Table 4-2. (Continued) Vacuum Syste
Page 57 and 58: Table 4-3. Bleed System Troubleshoo
Page 59 and 60: B.) (Continued)Table 4.4 (Continued
Page 61 and 62: Table 4.5 (Continued) RF System Tro
Page 63 and 64: MaintenanceNo regular maintenance i
Page 65 and 66: 0000CommonDC VoltsDiagram 2.18. Con
Page 67 and 68: 4. Turn off RF power.5. To adjust o
Page 69 and 70: APPENDIXThe appendix is a collectio
Page 71 and 72: PUMP-DOWN SPEEDAdditional vacuum ho
Page 73 and 74: GAS FLOW CONVERSION FACTORSGas Symb
Page 75 and 76: 4. When the programmed gas percenta
Page 77 and 78: As long as Independent Pressure Con
Page 79 and 80:
GLOSSARYThe following lists definit
Page 81 and 82:
Plasma: A highly energetic state of
Page 83 and 84:
Ultraviolet (UV) Light: The region
Page 86 and 87:
SCHEMATICSThe following pages are t
show all

March CS 1701 RIE Operations and Maintenance Manual

Create successful ePaper yourself

Delete template?

Save as template?