Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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<strong>HiPIMS</strong> - Power supply2000−2002502001503 mTorr5 mTorr10 mTorr15 mTorr20 mTorrV T[V]−400−600I T[A]100−800−1000−12000 20 40 60 80 100 120t [µS]3 mTorr5 mTorr10 mTorr15 mTorr20 mTorr500−500 20 40 60 80 100 120t [µS]The pulse generator was SINEX 2 from ChemfiltIonsputter<strong>in</strong>gThe exact pulse shape is determ<strong>in</strong>ed by <strong>the</strong> load<strong>the</strong> discharge formedit depends on <strong>the</strong> gas type and gas pressureThe average power was <strong>in</strong> <strong>the</strong> range 215 − 270 W, pulselength from 80 to 90 µs and repetition frequency was 50 Hz
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