Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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<strong>HiPIMS</strong> - Electron energyT eff[V]4.543.532.521.510.50(a)−0.50 50 100 150axial position [mm]r = 0 mmr = 20 mmr = 40 mmr = 60 mmT eff[V]4.543.532.521.510.50(b)−0.50 50 100 150axial position [mm]r = 0 mmr = 20 mmr = 40 mmr = 60 mm65 µs230 µsThe spatial variation <strong>of</strong> <strong>the</strong> effective electron temperatureat 65 µs and 230 µs from <strong>the</strong> <strong>in</strong>itiation for gas pressure <strong>of</strong> 5mTorr.The pulse is 90 µs long and <strong>the</strong> average power 270 W and<strong>the</strong> target made <strong>of</strong> copperThe effective electron temperature is uniform along <strong>the</strong>radius <strong>of</strong> <strong>the</strong> discharge
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