Langmuir probe study of the plasma parameters in the HiPIMS ...

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HiPIMS - Electron energyThe electron energy probability function (EEPF) under therace-track 100 mm below the target for an argon dischargeat 3 (dashed) and 20 (solid) mTorr with a copper target
HiPIMS - Electron energyThe measured EEPF is Maxwellian-like during the pulsehigh electron density leads to a Maxwellian-like low energypart of the EEPFthe depletion in the high energy part is due to the escape ofhigh energy electrons to the chamber walls and inelasticcollisions of high energy electronsThe EEPF is more broad at low pressure and early in thepulse
Page 1 and 2: Langmuir probe study of the plasmap
Page 3 and 4: Planar dc Magnetron Sputtering Disc
Page 5 and 6: High Power Impulse Magnetron Sputte
Page 7 and 8: HiPIMS - Electron density - summary
Page 9 and 10: HiPIMS - ExperimentThe goal of this
Page 11 and 12: Plasma parameters - Langmuir probeA
Page 13 and 14: HiPIMS - Electron density10 19 axia
Page 15: HiPIMS - Plasma potentialV pl[V]654
Page 19 and 20: HiPIMS - Electron energyDuring the
Page 21 and 22: AcknowlegdementsCan be downloaded a

Langmuir probe study of the plasma parameters in the HiPIMS ...

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