Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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SummaryWe discussed <strong>Langmuir</strong> <strong>probe</strong> measurements <strong>of</strong> <strong>the</strong><strong>plasma</strong> <strong>parameters</strong> <strong>of</strong> <strong>the</strong> high power impulse magnetronsputter<strong>in</strong>g discharge (HIPIMS)The electron densityroughly 1 – 3 orders <strong>of</strong> magnitude higher than <strong>in</strong> a dcmagnetron sputter<strong>in</strong>g dischargeThe electron energy distribution function (EEDF)is Maxwellian-like dur<strong>in</strong>g <strong>the</strong> pulseThe electron energyis below 1 V towards <strong>the</strong> end <strong>of</strong> <strong>the</strong> pulse probably due tohigh metal content <strong>in</strong> <strong>the</strong> discharge
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