Langmuir probe study of the plasma parameters in the HiPIMS ...

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Plasma parameters - Langmuir probeThe EEDF was determined fromthe Druyvesteyn formulag e (V ) = 2m ( ) 2eV 1/2d 2 I ee 2 A m dV 2The electron densityn e =∫ ∞0g e (E) dEThe effective electrontemperatureT eff = 2 3 〈E〉 = 2 ∫1 ∞Eg e (E) dE3 n e0The measured datawas filtered(Magnus and Gudmundsson, 2008)
HiPIMS - Electron density10 19 axial position [mm]10 19 axial position [mm](a)(b)n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 150n e[m −3 ]10 1810 17r = 0 mmr = 20 mmr = 40 mmr = 60 mm10 160 50 100 15065 µs230 µsThe spatial variation of the electron density at 65 µs and230 µs from the initiation for gas pressure of 5 mTorr.The pulse is 90 µs long and the average power 270 W andthe target made of copperThe electron density is uniform along the radius of thedischarge
Page 1 and 2: Langmuir probe study of the plasmap
Page 3 and 4: Planar dc Magnetron Sputtering Disc
Page 5 and 6: High Power Impulse Magnetron Sputte
Page 7 and 8: HiPIMS - Electron density - summary
Page 9 and 10: HiPIMS - ExperimentThe goal of this
Page 11: Plasma parameters - Langmuir probeA
Page 15 and 16: HiPIMS - Plasma potentialV pl[V]654
Page 17 and 18: HiPIMS - Electron energyThe measure
Page 19 and 20: HiPIMS - Electron energyDuring the
Page 21 and 22: AcknowlegdementsCan be downloaded a

Langmuir probe study of the plasma parameters in the HiPIMS ...

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