Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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Planar dc Magnetron Sputter<strong>in</strong>g Discharge10 19n e[m −3 ]T e[eV]10 1810 173 mTorr5 mTorr10 mTorr15 mTorr10 160 20 40 60 80 100 120 140z [mm]6543210 123 mTorr0T eh 5 mTorr510 mTorr15 mTorr1015Electron energy [eV]0T ecEEPF [eV (−3/2) /m 3 ]10 18 60402010 1610 1480120100z [mm]100 20 40 60 80 100 120 140z [mm](From Sigurjonsson and Gudmundsson (2008))The electron energy distribution is bi-Maxwellian
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