Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
<strong>HiPIMS</strong> - Electron density - summaryA monotonic rise <strong>in</strong> <strong>plasma</strong> densitywith discharge gas pressure(Gudmundsson et al., 2002)applied power (Alami et al., 2005)A l<strong>in</strong>ear <strong>in</strong>crease <strong>in</strong> electron densitywith <strong>in</strong>creased discharge current(Ehiasarian et al., 2008)The electron density depends on <strong>the</strong>target materialCr target gives higher density than Ti(Vetushka and Ehiasarian, 2008)The peak electron density travels awayfrom <strong>the</strong> target with fixed velocity(Gylfason et al., 2005)(After Bohlmark et al. (2005))
Change language