Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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<strong>HiPIMS</strong> - Electron energyTemporal variation <strong>of</strong> <strong>the</strong> effective electron temperature100 mm below <strong>the</strong> target under <strong>the</strong> race-track (r = 40 mm)Argon discharge at 3 and 20 mTorr with a copper targetThe electron energy decreases with <strong>in</strong>creased dischargepressure