Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
Langmuir probe study of the plasma parameters in the HiPIMS ...
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High Power Impulse Magnetron Sputter<strong>in</strong>g (<strong>HiPIMS</strong>)The high power pulsed discharge operates with aCathode voltage <strong>in</strong> <strong>the</strong> range <strong>of</strong> 500 – 2000 VCurrent densities <strong>of</strong> 3 – 4 A/cm 2Power densities <strong>in</strong> <strong>the</strong> range <strong>of</strong> 1 – 3 kW/cm 2Average power 200 – 600 WFrequency <strong>in</strong> <strong>the</strong> range <strong>of</strong> 50 – 1000 HzDuty cycle <strong>in</strong> <strong>the</strong> range <strong>of</strong> 0.5 – 5 %
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