SESHA 2011 Program Book - Semiconductor Safety Association

sponsored by IBM found that contact with less than 1
milliliter of a 12% or 25% TMAH solution was lethal
within 3 hours. IBM investigated possible underlying
mechanisms of acute systemic toxicity including the direct
effects on neurotransmission and on blood gases.
IBM took prompt action to assess and, where necessary,
enhance the health and safety procedures associated
with TMAH based on the results of these animal studies.
IBM notified the US EPA under the significant new
information provisions of the Toxic Substances Control
Act, Section 8e. Furthermore, IBM modified internal
chemical labels for formulations containing TMAH,
sponsored chemical-resistant glove and coverall permeation
testing on TMAH solutions, performed process
reviews on specific TMAH-using operations, and notified
employees and contractors of the potential hazard.
IBM implemented vigorous controls on the introduction
of new processes employing concentrated TMAH
solutions. Senior management is briefed on the potential
hazards of the process, the tool and engineering
requirements, and the availability of potential alternatives
to TMAH. IBM develops work plans to reduce or
eliminate potential TMAH hazards. In addition, IBM is
working in cooperation with several development partners
and suppliers to identify less hazardous alternatives
to TMAH.
4:30 pm The Integration of a Toxic Gas Monitoring
System into the Building Fire Alarm System
Sweeney, J; Harvard University
Many facilities have toxic gas monitoring systems
(TGMS) with local strobes to evacuate just clean rooms
and affiliated areas. However, many facilities do not integrate
their toxic gas monitoring systems into the building
fire alarms systems. This presentation will describe
three different types of toxic gas monitoring systems in
a university setting and will describe how all three systems
are integrated into the perspective building fire alarm
systems. Topics of interest in this presentation will be as
follows: 1. Details on TGMS Alarm level set points for
exhaust and ambient gas sensors and when they trigger
the building fire alarm systems; 2. Overview of how the
two systems are integrated 3. Reasons for integrating the
two systems; 4. Training details for all personnel involved
in this new integrated system. In a university setting, the
various working groups involved during emergencies
are more expansive than in an industry setting. Types of
people trained on the system (campus police, local fire
fighters, facilities personnel, university operations center
(24/7 hotline), EH&S department responders, building
occupants etc).
9
1:45-5:15 pm
GHG
Sonora C
1:45 pm Compliance Techniques for New Greenhouse
Gas Regulations
Higgs, T; Intel
New greenhouse gas regulations pertaining to
emissions reporting and facility permitting will impose
multiple new requirements on semiconductor manufacturers
and others in the electronics industries. The mandatory
reporting rule for additional sources of fluorinated
greenhouse gases (40CFR Part 98, subpart I) will
require new approaches for measuring emissions, tracking
inventories of fluorinated gases and heat transfer fluids,
and add extensive new recordkeeping and reporting
requirements. The Prevention of Significant Deterioration
and Title V Greenhouse Gas Tailoring Rule (40CFR
Parts 51, 52, 70 et. al.) will subject many sources to major
source permitting requirements that have previously
been able to avoid such requirements. These sources are
likely to experience greatly increased requirements to
understand and manage emissions impacts of routine
changes, and significantly increased monitoring, reporting
and recordkeeping burden. This presentation will
examine compliance techniques for meeting the new
requirements, and possible approaches for reducing the
burden.
2:30 pm PFC Stack Emissions Testing
Inloes, S; WaferTech
The goal of this testing was to determine if stack
testing could be used to replace recipe specific testing
required in the federal reporting rule. During February
of 2011, the SIA stack testing subcommittee developed
the various stack testing options for testing emissions
from electronic manufacturing Fabs. Various test methods
were considered with the criteria determined to be
1-10 ppb detection level . This equated to Fab emission
of 1,000 to 40,000 MT CO2 eq depending on the Fab’s
exhaust rate. Our site used GM/MS method to determine
the concentrations of PFC’s and collection the samples
using Summa containers. This method requires one-two
days of onsite sample collection by a local emission testing
company. Our process PFC emissions are routed to
five acid scrubber stacks. In April of 2011, we tested
the five acid scrubbers simultaneously to reduce any
variability of the site wide data. During the collection
of the samples daily PFC gas usage data was collected
and tier 2 emissions were compared to stack test results.