SESHA 2011 Program Book - Semiconductor Safety Association

10:00 am-3:15 pm
Risk Management
Sonora B
10:00 am Safety of Personnel Working Near Track
for “Overhead Transportion Vehicle”
Ibuka, S; Tokyo Electron Limited, Tokyo Japan
Recently unmanned transportion vehicle systams
running overhead (OHV:overhead transportion vehicle)
are often used in almost 300mm wafer IC fabrication
plants. On the other hand, height of equipment becomes
higer and higher. Personnel has to work upperside of
the equipment such as a furnace, wet station or coaterdeveloper.
OHV is running near the personnel. How
to protect the personnel not to crush into the OHV is
very high concern. Recent updated SEMI S17 is one approach
for vehicle safety design. At the last bSEMICON
Japan, a workshop to share concerns of facts, and to discuss
ideas to improve the situation among industry people.
SEMI Japan and SEAJ is collaborating to plan next
workshop. I would like to introduce Japanese activities
for the subjects and know global audience suggestions
for our approach hereafter.
10:45 am Integrated e-ESH System
Hsu, F-M; Hsinchu, Taiwan
Integrated e-ESH System Fang-Ming Hsu Deputy
Director, Risk Management and Corporate ESH Division
Taiwan Semiconductor Manufacturing Company,
Ltd. Chair, ESH Committee, SIA in Chinese Taipei ESH
management in semiconductor industry is essential but
very complex. In order to make it effective, experts
may have to spend quite long time, maybe for years,
for trial and error. And, after semiconductor companies
with its daily management have both become mature,
people often find they have lots of, or too many, ESH
sub-systems in place, and some of those sub-systems are
even overlapping with others. Therefore, it’s time for the
companies to enhance their systems’ efficiency. A way
of enhancing ESH management efficiency is computerizing
and integrating all ESH management systems. Finally,
an integrated e-ESH system can benefit the company
not only with enhanced management effectiveness
and efficiency, but also reduced cost and mitigated risks.
TSMC has adopted PDCA cycles into this system and
will share its experiences at this session.
11:30 am Lunch on your Own
1:00 pm Safety Analytics: The Future of Workforce
Safety and Health
Hohn, T, Duden, D; PureSafety
What Is Safety Analytics? Safety analytics is an
emerging science that is helping to drive improvements
not only in workforce safety and health programs, but
also in overall business performance. Deloitte Consulting,
a leading practitioner in this field, defines safety
analytics as “the science of studying the underlying
causes of and contributing factors to workplace accidents.”
On the surface, that may sound similar to what
top workforce safety and health professionals have done
all along. But what’s new — facilitated by software
tools and systems like PureSafety’s — is the amount and
range of data that can be analyzed. For example, part of
what distinguishes safety analytics from past practices is
the use of external data (demographics, lifestyle indicators,
industry financial data, etc.), as well as traditional
historical and observed data. Among other benefits, this
approach helps to ensure that human variables are appropriately
weighted in identifying risk and taking appropriate
preventive actions. Combined with the growing
use of leading indicators, leveraging safety analytics
gives you a more complete, and more current, picture of
everything from specific work processes and locations
up to the health of your safety culture in general. This,
in turn, leads to a more targeted, proactive allocation of
available resources and opens the path to continuous improvement
in critical areas, including: • Workplace accidents
and injuries • Compliance • Productivity • ROI
on safety expenditures • Employee satisfaction, morale,
loyalty and retention • Absenteeism • Product/material
damage • Managerial efficiency and effectiveness • Corporate
reputation
1:45 pm Surface Contamination of Dummy Wafer
and its Health Effect in Semiconductor Manufacturing
Industry
Choi, K; Samsung Electronics Co. LTD
Dummy wafer has been effectively used to monitoring
of equipment and process in semiconductor
manufacturing industry. However, it has been predicted
human health impacts by hazardous by-products which
could be generated on the wafer surface by chemical
reaction of various precursors such as toxic gases and
chemicals. Although there has been much attention on
the issue, it has not been studied yet. In this study, therefore,
we have explored the surface contamination of the
dummy wafers which have been used in semiconductor
processes by quantitative and qualitative analysis meth-
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