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SESHA 2011 Program Book - Semiconductor Safety Association

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product is 12-inches wafer, and it covers an area of 54<br />

million square meters, of which the gross Investment<br />

reaches to 5.26 billion dollars. About 3700 employees<br />

from Korea and China work for HSCL.<strong>Safety</strong> and Health<br />

Committee <strong>Safety</strong> and Health committee is a communication<br />

bridge between employee and employer, created<br />

by Hynix and Hynix labor union together for the purpose<br />

of promoting mutual understanding between the<br />

labor and the capital, dissolving and improving internal<br />

issues of environmental, health and safety related to employees,<br />

making the optimal working environment for<br />

employees. Specificity 1. Specialty As far as the organization<br />

structure is concerned, <strong>Safety</strong> and Health committee<br />

is a newborn thing. Similar organization structure<br />

has not been found by now in other related industry. 2.<br />

Innovation In a point of view of foreign labor unions’<br />

operating mode, there is a sharp contradiction in terms<br />

of interests between labor union and enterprises. But the<br />

Hynix labor union is designed to protect and coordinate<br />

the interests of both sides of labor and capital, satisfy<br />

the employees and promote the enterprise development<br />

as well. Operation Overview 1.Organization Chairman<br />

of a committee; Chinese labor union chairman, Korean<br />

deputy general manager Committee member; Korean<br />

leaders from manufacturing department, technology<br />

department, general affairs department, and personnel<br />

labor union committee Executive:Responsible persons<br />

from ESH department 2.Operation Mode: Practical<br />

meeting: We collect advice and suggestions monthly<br />

from the basic level by various means and hold the practice<br />

meeting to take them over in the end/beginning of<br />

a month. Solutions will be taken out and significant issues<br />

would be submitted to periodic meeting for further<br />

discussion.Periodic meeting:Periodic meeting is held<br />

quarterly to debrief the results of practical meeting and<br />

provide advice and solutions to significant issues. 3.Operation<br />

Content: <strong>Safety</strong>: Clean room odor, PPE, toxic<br />

gas monitoring Environment: Dorm odor, corporate<br />

environment, sewage treatment Occupational health:<br />

noise, psychological consult, smoking and drinking, individual<br />

radiation dosimeter 4.Operation results <strong>Safety</strong><br />

and Health Committee has collected and disposed more<br />

than 200 advice and suggestions from 2008. Our operating<br />

environment and the safety consciousness of workers<br />

has been greatly improved. And the sense of trust<br />

between labor and capital has been enhanced a lot as<br />

well. As a result, our employees put more energy into<br />

production, makes more output and profit. In 2010, We<br />

Hynix got the historically highest profits.<br />

10:45 am A Study on Odor Reduction for <strong>Semiconductor</strong><br />

Industry<br />

Park, NH, Kim, SG, Shin, CS; Hynix <strong>Semiconductor</strong>,<br />

Repulic of Korea<br />

A Study On Odor Reduction for <strong>Semiconductor</strong><br />

Industry No-Hyeok Park, Sung-Gon Kim, Chong-Su<br />

Shin Cheong-Ju ESH Team, Administrtion Division,<br />

Hynix <strong>Semiconductor</strong> Inc. 1,55,125 Hyangjeong-dong<br />

Hungduk-gu Cheongju 361-725 Repulic of Korea Tel<br />

: 82-43-280-2615, Fax : 82-43-280-2489, E-mail : nohyuck.park@hynix.com<br />

Odor is caused by one or more<br />

volatilized chemical compounds that human being can<br />

perceive by the sense of olfaction and can feel unpleasant<br />

and disgusted. It is one kind of sensory pollution that<br />

results in physical and psychological harm. Especially,<br />

semiconductor industry have had difficulty in managing<br />

unclear odor as air pollutants generated by many<br />

kinds of gasesous chemical compounds and considering<br />

reduction measures. Hynix <strong>Semiconductor</strong> Inc. judged<br />

that odor problems will be issued by residents because<br />

the residential areas have been created close to Cheongju<br />

site. Therefore, our company put technical measures<br />

to practical use for odor management generated from<br />

semiconductor plant. In first step, the correlation between<br />

the concentration of exit specific compounds(e.g.<br />

HF, NH3) and the odor was considered for selecting<br />

odor index. The complex odors in itself were selected<br />

for the optimal management index. In second step, reduction<br />

characterisitics by emission sources for the<br />

practical use of odor reduction were studied. Especially,<br />

the exhaust part of the thin film process had the<br />

highest odor concentration based on the result derived<br />

from the priority for the classification of the emission<br />

odors. A wet scrubber in installed to treat the odor intensively<br />

between the plasma scrubber to decompose<br />

PFC gas at high temperature and the final wet scrubber.<br />

Also, the odor removal efficiency of Hume generated<br />

from SC-1 wastewater(Mixed of NH4OH and H2O2)<br />

improved with building the wet scrubber (H2SO4 neutralization)<br />

for NH3. Its process is seperated from existing<br />

wet scrubber(NaOH neutralization) for acid. Hynix<br />

<strong>Semiconductor</strong> Inc. was able to decrease about 70% of<br />

complex odors in 2010 compared to 2009 with the odor<br />

reduction technologies as state above. Odor monitoring<br />

systems for odor quality analysis and real-time management<br />

are being currently investigated. This research introduces<br />

our company’s odor reduction control system<br />

for win-win strategy between the semiconductor industries<br />

and the nearby residents.<br />

11:30 am Cash & Carry Lunch, Exhibit Hall<br />

11

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