SESHA 2011 Program Book - Semiconductor Safety Association

William R. Acorn, PE, FASHRAE
William Acorn is Founder and Principal of Acorn
Consulting Services, LLC. For over 35 years, he has
provided innovative analysis, engineering consultation
and project design and delivery services for hundreds of
projects ranging from institutional laboratories to cleanroom
facilities for the semiconductor industry. During
his more than 20 year tenure as founder and principal of
a multi-office, multi-disciplined design firm providing
engineering services on projects throughout the country,
he developed successful techniques for evaluating and
solving the most complex of project design and management
issues. He received numerous awards for technical
excellence and has been recognized for ongoing technical
achievements, innovation and foresight by peers,
associates and clients, including election to the level of
Fellow in the industry-leading organization ASHRAE.
His consulting expertise has been influential in shaping
the approach to code compliance and life safety in semiconductor
and similar advanced technology facilities.
Bryan J Benaway
Bryan is currently a senior scientist in the FTIR
group at URS Corporation. His primary focus is in application
of optical systems for gas-phase measurements
in support of environmental testing. Bryan earned a MS
in Physics from the University of Texas where he used
molecular beam techniques to study rare gas clusters.
Allan D. Chasey
Dr. Allan D. Chasey is an associate professor in the
Del E. Webb School of Construction, at Arizona State
University. He is the Director of CREATE, Construction
Research and Education for Advanced Technology
Environments, a research and education consortium representing
advanced technology design and construction
industry. Dr. Chasey is a registered Professional Engineer
in Arizona and a LEED AP.
Chi-Hua Chen
Safety manager ESH Department, experienced in
semiconductor process-specific and abatement performance
study.
Tianniu Chen
Tianniu Chen received his PhD in Organometallic/
Materials Chemistry from the University of Tennesse
(Knoxville), where he studied chemistry of high-oxidation-state
groups V and VI complexes. Tianniu joined
Advanced Technology Materials, Inc. (ATMI) in 2002
Speaker Biographies
25
and started as a principle investigator on discovering
and developing novel deposition materials surrounding
copper-based advanced interconnects for both logic and
memory applications in semiconductor industry. Tianniu
currently holds the position of senior technologist
at ATMI where he is leading the efforts on developing
novel cleaning formulations in wet-processes for both
semiconductor and photovoltaic applications. Tianniu
has authored twelve issued patents, thirty-four peerreviewed
publications and twenty-six conference proceedings/presentations.
Ju-Hsiu Cheng
Ju Hsiu Cheng have been working at Industrial
Technology Research Institute about 4 years Ms.Cheng
attended many project on environmental management,
including Montreal and Kyoto Protocol on international
environmental issue, abatement of PFCs、HFCs
and SF6 , cleaner production etc. Now, she is a consultant
of the Taiwan Semiconductor Industrial Association
, Taiwan photo electronic industry association and Taiwan
TFT-LCD association. She is response to execute
the three association Environment Safety and Health
committee work.
Cheng Ching-Lung
My name is Andy. I am graduated from National
C.K. University in Taiwan and majored in Environmental
Engineering. I work at Powerchip Technology Corp
in Taiwan, and we manufacture DRAM. I do this job
since 2002, and my job function is environmental protection
and ISO14001 management system. The working
area are including air pollution control, water pollution
control, and solid waste management.
Junghyun Choi
He has worked for KDIA(Korea Display Industry
Association) since 1999.
Kwangmin Choi
Jeremy Cook
Jeremy Cook is an experienced environmental
manager with a focus in air and water resources, risk
management and sustainability. He is currently Principal
Consultant with EORM. In this role, he consults with
organizations on sustainability strategy, environmental
management, air and water resource management and
product lifecycle issues. His past experience includes
serving as Managing Director of Ecovine Solutions and
Project Management roles with Parsons and CH2M